With its unique optical design technology, the Imperia detects and classifies yieldkilling defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring.
There are significant economic savings to be gained by more accurately predicting MOCVD reactor yield and PM schedules. Combining these two post-epitaxial metrology screening functions into a single high throughput system minimizes valuable fab space use and cassette handling time.
Please contact our sales for detail information
+86-21-64813366
sales@quatek.com.hk
