Napson Non-Contact Ultra-Low Sheet resistance measurement system

  • Product No:PVE-80
  • Manufacturer:Napson Corp.

PVE-80 is a Non-Contact (Pulse-Voltage excitation method) Ultra-Low Sheet resistance measurement system by Napson.


  • No damage measurement by non-contact Pulse-Voltage excitation method

  • Easy to measure & carry around, Removable stage plate

  • Easy operation and data processing by PC with Software

  • Measurement result can shown by 3 types of measurement unit(Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])

  • Pulse-Voltage excitation method : Pat. No.5386394
           


Specifications(Tentative)

  • Measurement range:50u~1m ohm/sq

  • Accuracy:≦ 3%

  • Repeatability (CV):≦ 0.1% ( % of sigma)

  •                     at 20 times measurement(same point)

  • Spot size:14 mm

  • Gap:2 mm (Distance between upper and lower probe)

Measurement Sample

  • Metal films :Ag , Cu , Au , Al or others