SRS-2010 is a spread Resistivity system by Napson.
Resitivity map along with depth direction, thickness of epitaxial , depth of PN junctin and carrier density profiles
Sample sizes
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Measuring range
1~10E+9 Ω[Spread resistance]
Carrier density range: 2E+13 ~ 5E+19 cm2 [N-type silicon]
2E+14 ~ 7E+19 cm2 [P-type silicon