Non-contact measurement wafer sorting system (Robot hand tranceportation)

  • Product No:NC-3000R
  • Manufacturer:Napson Corp.

NC-3000R is a Non-contact measurement wafer sorting system (Robot hand tranceportation) by Napson.


  • High accuracy measurement system for large diameter wafer

  • Non-contact measurement of resistivity, thickness and conductivity (P/N)

  • Compact design of Two-stage by measuring area and transfer area

  • Number of cassette station can be changed by customers request

  • Option : Add wafer flattness measurement system(FLA-200)
           


  • Sample sizes
    6 ~ 8 inch, or 12 inch

  • Measuring range
    [R] 1m ~ 200Ω・cm
    [Thickness] 150 ~ 800μm (300μm between 150~800μm)

  • The range is separated from each Low, Middle, High and S-High probe type