Wafer Flatness Measurement System

  • Product No:FLA-200
  • Manufacturer:Napson Corp.

FLA-200 is a Wafer flatness measurement system by Napson.


  • Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)

  • Measures all materials including Si, GaAs, Ge, InP, SiC

  • Full 500 micron thickness measurement range without re-calibration

  • 2-D /3-D Mapping software    


  • Sample sizes

    3~8 inch

  • Measuring range
    Thickness: 200 –1200μm
    Bow : +/-350μm
    Warp: 350μm