PG2101 Semi-automatic prober is designed for LED Flip Chip production line.
It can do top side or bottom side probing test. This prober is suitable for 2”~6” wafers and dices.
PG2101 also can tune the probing speed to fit the different applications.
It also can depend on customer’s requirement to make different customer design.
X/Y axis
Frame: High accuracy ball cyclic bearing screw
Stroke: 210mm x 265mm
Resolution: 0.5 um
Accuracy: ≦±7 um
Repeatability:±4 um
Z axis
Frame: Stepper motor-Linear bearing
Stroke:-0.5 ~ 7.5 mm
Resolution: 1 um
Accuracy: ±≦ 2um
Repetability: ±≦4 um
Load bearing: 10KG
Theta axis
Max. angle: 10 degree
Resolution: 0.001 degree
Chuck
Material: Quartz glass
Vacumm hole: 500um (customize available)
Flatness: 10um
Option
Platen for 4 sets of micropositioner
2 set of ink.
Probe card supporter
CCD Telecentric Lens 0.5X
Integrating sphere
