Wentworth’s Pegasus™ S200FA-HV prober is ideally suited for testing Power Devices and can be easliy integrated with a wide range of tester instruments. The Pegasus™ S200FA-HV platform provides a flexible on-wafer probing solution focused on high-power semiconductor characterization
The Pegasus™ S200FA-HV High Power configuration addresses today’s power semiconductor test challenges with Low Contact Resistance Measurements requiring accurate measurements at high voltages. Kelvin Chucks & Backside probing solutions allow Contact Resistance measurements in the milli ohm range.
High Current probes & probe cards (up to 100A) handle and distribute excessive current loads. Dedicated HV & HC probes reduce probe and device destruction at high voltages/currents to prevent device heating and arcing at the tip.
Flexible for a wide range of Power Device testapplications; High Voltage, High Current.
Precision engineering for reliable and repeatable submicron probing.
Adaptable for industry standard testers.
Temperature probing from –65°C to +400°C utilizing Wentworth’s GuardMasterTM
Customizable product enhancing hardware and software options.
Chuck isolation safety enclosures and relay switching
Operator safety during measurement
Robust mechanical design.
Cost effective test solutions.
High Power
Voltage：3KV (Triax), 10KV (Coax)
Current：200 Amps (Pulsed)
Leakage：<1pA (3KV)
HV PROBE NOISE VS TEMPERATURE
Temperature Noise
+25°C 100fA
+200°C 100fA
HIGH VOLTAGE/THERMAL KELVIN WAFER CHUCKS
Temperature Stability ±0,1°C
Temperature Accuracy ±0,5°C
Isolation >0.5 TOHM @ +25°C
Capacitance 1600pF (Standard)
200pF (Triax)Max Voltage 10KV @ Chuck Top
Leakage <1pA (3KV)
HV PROBE LEAKAGE VS TEMPERATURE
Temperature Leakage
+25°C <200pA
+200°C <200pA
