The Pegasus A200 Series wafer probers deliver menu-driven, push button control via proprietary LabMaster™ control and monitoring software. An extensive range of control and monitoring parameters enable users to operate Pegasus A200 series wafer probers at peak performance, including: real-time monitoring and test setup; premium mapping capability; image analysis; and a host of other advanced features.
The Pegasus A200 Series wafer probers dual-end, parallel processing of wafers optimizes wafer handling for maximum throughput. Designed for easy access when manually loading and unloading wafers, Pegasus A200 has a capacity of two cassettes, each containing 25 wafers. Featuring a highly advanced, single-stage wafer detection pre-alignment and transportation system, Pegasus A200 wafer probers ensures long-term accuracy and repeatability.
Full range of handling capabilities for a variety of materials such as GaAs, saw frames, ceramic
Powerful, user-friendly control and monitoring software
Pattern recognition system
Robot handling system
Configurable to high voltages in excess of 5 kV for specialized applications
Optional thermal chuck capability
Menu-driven, push button control.
Real-time monitoring and test setup.
Yield analysis of both the wafer and batch under test.
Premium mapping capability.
Probe to pad alignment for saw frame die.
PROBER
XY STAGE
Type
High precision re-circulating ball screws
Stage Travel 210 mm x 210 mm (8.3” X 8.3”)
Resolution 1.25 μm
Accuracy ± 7 μm over 200mm
Repeatability ± 4 μm
XY Speed Up to 100 mm/s
Automatic Alignment Repeatability ± 5 μm
WAFER HANDLER
ROBOT Speed 1270 mm/s (R), 254 mm/s (Z), 800 o/s (Ø)
Positional Repeatability 12.7 μm (Z), 38.1 μm (R)
0.01°(Ø) at constant temperature
Flat Orientation Selectable
Pre-Alignment Accuracy ± 63.5 μm ± 0.125o
Repeatability ± 4 μm
XY Speed Up to 100 mm/s
