Semi-automatic four point probe sheet resistance/resistivity measurement

  • Product No:Cresbox
  • Manufacturer:Napson Corp.

Cresbox is a semi-automatic 4 point probe sheet resistance/resistivity measurement system by Napson.

Selling Points

  • User programable measurement pattern & programmable measuring pattern
  • Tester self-test function, wide measuring range
  • Thickness, edge, temperature correction for silicon wafer
  • Film thickness conversion function from sheet resistance

Applications

  • Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
  • Conductive thin film (Metal, ITO etc)
  • Diffused sample (or layer)
  • Silicon-related epitaxial materials, Ion-implantation sample
  • Others (*Please contact us for details)


  • User programable measurement pattern & programmable measuring pattern

  • Tester self-test function, wide measuring range

  • Thickness, edge, temperature correction for silicon wafer

  • Film thickness conversion function from sheet resistance    


  • Sample sizes
    ~ 8 inch, ~156x156mm

  • Measuring range
    [R] 1m~300k Ω・cm
    [RS] 5m~10M Ω/sq
           

Image of Mapping

  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement
  • Semi-automatic type Multi point measurement