Non-contact sheet resistance /resistivity measurement instrument

  • Product No:EC-80
  • Manufacturer:Napson Corp.

EC-80 is a manual eddy current sheet resistance/resistivity measurement system by Napson.


  • Easy operation and compact design

  • Auto-measurement start by inserting a wafer under the probe

  • Easy set up to measurement condition by JOG dial

  • 5 types of model for each measuring range
           


  • Sample sizes
    ~8 inch, ~156x156mm

  • Measuring range

    [R] 1m ~ 200 Ω・cm

    [RS] 10m ~ 3,000 Ω/sq

  • The range is separated from each Low, Middle, High and S-High probe type.