RT-3000/RG-1000F is a Fully automatic(robotic transfer) 4 point probe system for silicon wafer by Napson.
Fully automatic system for large sizes of flat panel with glass loading robot
Tester self-test function, Measurement position correction function, wide measurement range
Min. 0.1 mm meas. resolution and user programmable test pattern
Host (CIM) communication and 2-D/3-D Mapping software
Sample sizes
~2,880 x 3,080mm
Measuring range
1. RT-3000/S version;
[RS] 1m~10M Ω/sq
2. RT-3000/H version;
[RS] 10m~1GΩ/sq