Global standard model for 4 point probe sheet resistance automatic measurement system

  • Product No:RT-3000 / RG-1000F
  • Manufacturer:Napson Corp.

RT-3000/RG-1000F is a Fully automatic(robotic transfer) 4 point probe system for silicon wafer by Napson.


  • Fully automatic system for large sizes of flat panel with glass loading robot

  • Tester self-test function, Measurement position correction function, wide measurement range

  • Min. 0.1 mm meas. resolution and user programmable test pattern

  • Host (CIM) communication and 2-D/3-D Mapping software
       


  • Sample sizes
    ~2,880 x 3,080mm

  • Measuring range
    1. RT-3000/S version;
    [RS] 1m~10M Ω/sq
    2. RT-3000/H version;
    [RS] 10m~1GΩ/sq