NC-60F/RS-1300N is a Fully automatic non-contact sheet resistance measurement system for flatpanel display by Napson.
Global standard for non-contact measurement of ITO film, Metal thin films on flat panel
Automatic X-Y and Z (eddy current probe head) axis moving mechanism
Compatible with Loading robot for fully automatic measurement
Option :
Integlate to combined system (film thickness meter, etc)
Add 4 point probe measurement unit : RT-3000
Sample sizes
~ 2,880 x 3,080mm
Measuring range
[RS]
<1. for ITO> 5~800 Ω/sq
<2. for Metal thin film> 10m ~ 10Ω/sq
［ITO film thickness］ 20 nm (200A)～500 nm (5,000A)
