The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution – better than 10 μm – which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.
Can be used in atmosphere conditions
Spatial resolution is better than 10 μm
Three measurement modes:
- Static
- Line Profile
- 3D Mapping
Measurement Range: 0 to ±1 kV DC
Spatial Resolution (Reference to input voltage with combshaped electrode: 60% of signal strength for 10 μm width
70% of signal strength for 20 μm width
Separation between Detector Tip and Surface Under Test (Controlled with piezo stage in Z axis): Typically 5 μm
Accuracy: Better than 0.5% of full scale
Voltage Sensitivity: Better than 100 mV
Sampling Speed: 30 ms to 0.1 ms per data sample
Scanning Area
X and Y Axis: ±15 mm with 1 μm resolution
Z Axis Range: 0 to 5 mm
Z Axis Piezo Stage Range: 0 to 80 μm with 1 μm accuracy
Optical System
Laser Unit for Detecting Cantilever Distortion: Laser Diode 670 nm with detector photodiode
Observation for Actual Measurement Point
Light Source: Green LED
Camera: CCD with 380k pixels
Object Lens: 10X lens for 500 μm square under the monitor camera