No matter your specific wafer inspection requirements, Nanotronics provides a range of solutions for obtaining rapid results.
This compact system is designed for high-throughput macro inspection for wafers up to 200 mm. In milliseconds, the nSpec®
Macro automatically detects and quantifies numerous defects from 50 to 100 microns, contingent on field of view or wafer size.
nSpec® Macro allows one to illuminate the full circumference of the specimen, or to program lighting angles and/or discrete lighting vectors. Brightfield, Darkfield, Orthogonal, and configurable Oblique Lighting angles paired with individually modifiable LEDs adjust the intensity, color, and location of illumination.
The system a+J7:J9utomatically exports a csv file and is SECS/GEM compatible, or can be tailored to fit customer requirements.
Automated Wafer Handling
All Nanotronics Automation nSpec® Macros incorporate
a wafer loader that meets industry-standard demands.
Nanotronics creates end eff ectors that load whole individual wafers and/or wafers with exclusion zones. Each end eff ector is conceived according to the customer’s needs.
Wafer Loader
Runs one cassette at a time: Standard h-bar cassette
Standard Wafer Sizes: 50, 75, 100, 150, or 200 mm
Dimension (W x D x H): 71 cm x 74 cm x 67 cm
Weight: 62 kg
Minimum Vacuum Requirement: 20 in. Hg
Power supply: 220v, 3.5 amps
Control Software
Recipes are easy to configure and save as needs evolve.
Multiple scans can be run sequentially with complete
flexibility in illumination angle, intensity, and wavelength.
Optics
Darkfield Illumination Mode
Angle of illumination: 0 degrees
Oblique Illumination Mode
Angle of illumination: 0 to 80 degrees
Brightfield Illumination Mode
Angle of illumination: 90 degrees
Orthogonal Illumination Mode
Angle of illumination: 90 degrees (through the lens)
