Wentworth Pegasus™ FA series wafer probers set the highest standard for versatility and ease of operation. An ideal platform for many applications, Pegasus™ S300FA semi-automatic wafer probe stations utilize a wide selection of productivity-enhancing accessories and accommodate upgrades to meet future probing requirements.
Pegasus™ FA Series semi-automatic wafer probers are a remarkably versatile probing platform, designed specifically for failure analysis applications, device characterization, DC, low leakage, high voltage, radio frequency / microwave, die probing, low volume wafer probing and / or ultra-fine geometries at the die level
Pegasus™ S300FA supports full and partial wafers to 300mm
Temperature ranges from -60°C to 300°C
Support a wide range of cantilever probe cards
Motorized and manually driven manipulators
Programmable and manual microscope mounts
Lasers for cutting and marking
Temperature chuck plus a wide range of other accessories
Easy to Use
Pegasus™ console with joystick and LCD monitor display features simple menus enabling the user to operate the prober with ease
Optional LabMaster™ software enables the part time-to-advanced user to design sophisticated test routines
LabMaster™ seamlessly integrates with leading testers while simultaneously communicating with all probe system accessories
Positioning Accuracy
Precision ball-screws and stepper motors deliver repeatable accuracy over a wide temperature range due to Wentworth's exclusive calibration process
Frequency ：dc > 100Mhz
Breakdown Voltage ：500V
Leakage ：+/-10fA -65°C > +200°C +/-20fA +200°C > +400°C
chuck Stage
X-Y Stage
Precision ball-screws & stepper motors
Travel 310mmx400mm
Resolution 0.312 μm
Repeatability ± 4.0 μm
Accuracy ± 5.0 μm
Planarity 8 μm
Maximum speed 100mm/sec c
Z Stage
Precision ball-screws & stepper motors
Travel 11mm
Resolution 0.156 μm
Repeatability ± 1.0 μm
Theta Stage
Travel ± 8.0°
Resolution 0.0001°
Programmable Microscope Mount
Stepper Motors
Travel 50mm x 50mm x 100mm
Resolution 0.15 μm
Repeatability ± 1.0 μm
Accuracy ± 2.5 μm
Probe Platform
Drive type Stepper Motors Stepper Motors
Z Travel 18mm
Material Nickel Plated Steel Nickel PlatedSteel
Graphical User Interface
Windows 7, 8.1 and 10
Communication Interfaces
PC TTL, RS232, GPIB (IEEE488.2), ETHERNET
Utilities
Power 100-240 VAC 50/60 Hz select 600VA
Vacuum 0.5cfm @20” Hg (min)
Compressed air 4 bar min
Dimensions (WxDxH)
Prober (excludes optics) 880x875x610mm
Controller 450x480x180mm
Shielding
Light > 120 db
EMI > 20 db 0.05-0.5 Ghz, 30 d0.5-3Ghz
Weight
Prober 131 kg
