Wentworth’s PegasusTM S200FA-HV prober is ideally suited for testing Power Devices and can be easliy integrated with a wide range of tester instruments. The PegasusTM S200FA-HV platform provides a flexible on-wafer probing solution focused on high-power semiconductor characterization
The PegasusTM S200FA-HV High Power configuration addresses today’s power semiconductor test challenges with Low Contact Resistance Measurements requiring accurate measurements at high voltages. Kelvin Chucks & Backside probing solutions allow Contact Resistance measurements in the milli ohm range.
High Current probes & probe cards (up to 100A) handle and distribute excessive current loads. Dedicated HV & HC probes reduce probe and device destruction at high voltages/currents to prevent device heating and arcing at the tip.
High Current Probing for DC and Pulsed.
Kelvin Sense Measurement (Source & Chuck).
Low CRes Back Side Contact (Drain/Source)
Handling Thin Wafers
Low Leakage/High Voltage
Safety (High Current/High Voltage Measurements)
Features
Voltage ：3KV (Triax), 10KV (Coax)
Current：200 Amps (Pulsed)
Leakage： <1pA (3KV)
HIGH VOLTAGE/THERMAL KELVIN WAFER CHUCKS Specifications
Temperature Stability ±0,1°C
Temperature Accuracy ±0,5°C
Isolation >0.5 TOHM @ +25°C
Capacitance ：1600pF (Standard) 200pF (Triax)
Max Voltage： 10KV @ Chuck Top
Leakage ：<1pA (3KV）
HV PROBE LEAKAGE VS TEMPERATURE
+25°C <200pA
+200°C <200pA
chuck Stage
X-Y Stage
Precision ball-screws & stepper motors
Travel 210mmx314mm
Resolution 0.312 μm
Repeatability ± 4.0 μm
Accuracy ± 5.0 μm
Planarity 8 μm
Maximum speed 100mm/sec c
Z Stage
Precision ball-screws & stepper motors
Travel 11mm
Resolution 0.156 μm
Repeatability ± 1.0 μm
Theta Stage
Travel ± 8.0°
Resolution 0.0001°
Programmable Microscope Mount
Stepper Motors
Travel 50mm x 50mm x 100mm
Resolution 0.15 μm
Repeatability ± 1.0 μm
Accuracy ± 2.5 μm
Probe Platform
Drive type Stepper Motors Stepper Motors
Z Travel 18mm
Material Nickel Plated Steel Nickel PlatedSteel
Graphical User Interface
Windows 7, 8.1 and 10
Communication Interfaces
PC TTL, RS232, GPIB (IEEE488.2), ETHERNET
Utilities
Power 100-240 VAC 50/60 Hz select 600VA
Vacuum 0.5cfm @20” Hg (min)
Compressed air 4 bar min
Dimensions (WxDxH)
Prober (excludes optics) 840x842x610mm
Controller 450x480x180mm
Shielding
Light > 120 db
EMI > 20 db 0.05-0.5 Ghz, 30 d0.5-3Ghz
Weight
Prober 131 kg
