Pegasus™ S200 wafer probers are specifically designed for production probing of a wide range of semiconductors including semiconductors, light-emitting diode (LED) and microelectromechanical systems (MEMS) devices. It is also highly recommended for characterization applications and is designed to handle 2" to 200mm full and partial wafers. Pegasus™ S200 offers rapid probing with tunable speed for specific applications. Probing may be done with either cantilever probe cards or using Pegasus™ Probe integrated wafer edge / height sensor. Pegasus™ Probe is a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications.
Fast Probing up to 100mm / sec
TTL, Ethernet (10BaseT), RS232 and IEEE 488
Easy integration of cameras and other external test equipment components
Remote control using Pegasus™ remote commands
Active Wafer Profiling using Pegasus™ Probes
Semi-automatic two-point wafer alignment to reduce setup time Simultaneous, double-sided probing of up to 200mm wafers
Unique Calliper arm and probe needle design and Cantilever Probe Cards
Adjustable wafer size carriers
Tuneable gram force and speed settings
Chuck Stage
X-Y Stage
High precision ball-screws and stepper motors
Travel 210x210mm
Resolution 1.25 μm
Repeatability ± 4.0 μm
Accuracy ± 7.0 μm
Planarity 8 μm
Maximum speed 100mm/sec
Z Stage
Precision ball-screws and stepper motors
Travel 11mm
Resolution 1 μm
Repeatability ± 1.0 μm
Theta Stage
Travel ± 8.0°
Resolution 0.0001°
Probe Platform
Drive type Manual
Z Travel 11.5mm
Material Nickel Plated Steel
Graphical User Interface
Windows 7, 8.1 and 10
Communication Interfaces
PC TTL, RS232, GPIB (IEEE488.2), ETHERNET
Utilities
Power 100-240 VAC 50/60 Hz auto select 600VA
Vacuum 0.5cfm @20” Hg (min)
Compressed air 4 bar min
Dimensions (WxDxH)
Prober (excludes optics) 572x700x300mm 35x35.4x32.6”
Controller 450x480x180mm 17.5x19.5x7”
Weight
Prober 45 kg
Controller 13 kg
