Pegasus™ S300 wafer probers is an economical semi-automatic prober for testing full and partial wafers to 300mm, and is particularly effective for low volume probing, design verification, failure analysis and for probing packaged components. Pegasus™ S300 wafer probers can be easily be configured with numerous other productivity-boosting accessories.
The Pegasus™ S300 wafer probers has a precision stage for fine resolution and repeatable accuracy. Its modular design accommodates a wide range of productivity enhancing and field upgradeable options. Probing is accomplished with either probe cards or micromanipulators. Pegasus™ S300's stage mechanism, microscope mount, and multiple computer-aided probes can all be controlled with the joystick. The Pegasus™ S300 probe system can also be controlled using all industry accepted communications protocols.
TTL, Ethernet (10BaseT), RS232, IEEE 488 optional
Easy integration of cameras and Wentworth LabMaster™ control and monitoring software
Remote keyboard for easy control
Additional axes available for auxiliary control of probing accessories
Motorized platform for setting upper and lower safety limits for probe cards
Semi-automatic two-point wafer alignment to reduce setup time
Modular design for easily field upgrades
Chuck Stage
X-Y Stage
High precision ball-screws and stepper motors
Travel 310x310mm
Resolution 1.25 μm
Repeatability ± 4.0 μm
Accuracy ± 7.0 μm
Planarity 8 μm
Maximum speed 100mm/sec
Z Stage
Precision ball-screws and stepper motors
Travel 11mm
Resolution 1 μm
Repeatability ± 1.0 μm
Theta Stage
Travel ± 8.0°
Resolution 0.0001°
Probe Platform
Drive type Manual
Z Travel 11.5mm
Material Nickel Plated Steel
Graphical User Interface
Windows 7, 8.1 and 10
Communication Interfaces
PC TTL, RS232, GPIB (IEEE488.2), ETHERNET
Utilities
Power 100-240 VAC 50/60 Hz auto select 600VA
Vacuum 0.5cfm @20” Hg (min)
Compressed air 4 bar min
Dimensions (WxDxH)
Prober (excludes optics) 888x900x830mm 35x35.4x32.6”
Controller 450x480x180mm 17.5x19.5x7”
Weight
Prober 100 kg
Controller 13 kg
