Wentworth M200FA manual analytical wafer prober for up to 200mm (8-inch) wafers delivers a cost-effective probe station for failure analysis, device characterization and inline process verification. Its compact design and extensive feature set are ideally suited for diverse applications, including: small geometry probing; applications using high power optics; design debug; wafer level reliability (WLR) and electro static .
M200FA wafer prober can be configured with GuardMaster™, a guarded environmental chamber, to accommodate low-level and low temperature leakage testing. With controls conveniently located at the front of the system, the M200FA wafer prober offers fine and coarse positioning of the 8-inch x 12-inch XY stage. The Z control of the platen is also situated at the system front, offering variable Z movement as well as fine control for substrate probing.
M200FA wafer prober offers easy setup, positioning and adjustment of manipulators. M200FA wafer probers robust, stable probing platform accepts a wide range of accessories in addition to manipulators, including standard and custom chuck plates; manual, motorized or programmable microscope mounts; microscopes from leading optics manufacturers, needle holder assemblies, anti-vibration tables and more.
DC parametric
Frequency :dc > 100Mhz
Breakdown Voltage :500V
Leakage :+/-10fA -65°C > +200°C +/-20fA +200°C > +400°C
High Power configuration
Voltage :3KV (Triax), 10KV (Coax)
Current:200 Amps (Pulsed)
Leakage: <1pA (3KV)
Temperature chuck: -65 C to +400C
XY STAGE
X Travel :210 mm manual travel
Y Travel : 310mm manual travel
LINEAR MOTION GUIDES
Coarse ratio 1:1 — 70 microns per degree
Fine ration 10:1 — 7 microns per degree
CHUCK
Flat to within 10 μm (0.0004”) Micrometer drive theta, 15o Fine lift 250 microns
PLATEN
Height adjustment via fine adjustment wheel Suitable for magnetic or vacuum base manipulators Separation lift 10 mm (0.4”)
PHYSICAL DIMENSIONS – BASE
Width:840mm
Depth 842mm
Weight 131kg
Height : 610mm
Shielding
Light > 120db
EMI > 20db 0.05-05Ghz,30db 0.5-30Ghz