8” manual FA probe station

  • Product No:M200FA
  • Manufacturer:Wentworth Laboratories

Wentworth M200FA manual analytical wafer prober for up to 200mm (8-inch) wafers delivers a cost-effective probe station for failure analysis, device characterization and inline process verification. Its compact design and extensive feature set are ideally suited for diverse applications, including: small geometry probing; applications using high power optics; design debug; wafer level reliability (WLR) and electro static .

M200FA wafer prober can be configured with GuardMaster™, a guarded environmental chamber, to accommodate low-level and low temperature leakage testing. With controls conveniently located at the front of the system, the M200FA wafer prober offers fine and coarse positioning of the 8-inch x 12-inch XY stage. The Z control of the platen is also situated at the system front, offering variable Z movement as well as fine control for substrate probing.

M200FA wafer prober offers easy setup, positioning and adjustment of manipulators. M200FA wafer probers robust, stable probing platform accepts a wide range of accessories in addition to manipulators, including standard and custom chuck plates; manual, motorized or programmable microscope mounts; microscopes from leading optics manufacturers, needle holder assemblies, anti-vibration tables and more.


DC parametric                                                    

  • Frequency :dc > 100Mhz

  • Breakdown Voltage :500V

  • Leakage :+/-10fA -65°C > +200°C +/-20fA +200°C > +400°C        

High Power configuration                                               

  • Voltage :3KV (Triax), 10KV (Coax)

  • Current:200 Amps (Pulsed)

  • Leakage: <1pA (3KV)  

  • Temperature chuck: -65 C to +400C

XY STAGE 

  • X Travel :210 mm manual travel 

  • Y Travel :  310mm manual travel

LINEAR MOTION GUIDES 

  • Coarse ratio 1:1 — 70 microns per degree                                                                 

  • Fine ration 10:1 — 7 microns per degree 

CHUCK 

  • Flat to within 10 μm (0.0004”) Micrometer drive theta, 15o Fine lift 250 microns 

PLATEN 

  • Height adjustment via fine adjustment wheel Suitable for magnetic or vacuum base manipulators Separation lift 10 mm (0.4”) 

  • PHYSICAL DIMENSIONS – BASE 

  • Width:840mm

  • Depth 842mm

  • Weight 131kg

  • Height : 610mm

Shielding

  • Light > 120db

  • EMI > 20db 0.05-05Ghz,30db 0.5-30Ghz