The PegasusTM A200D series offers simultaneous, double-sided probing of up to 8” wafers in a compact and easy to use fully automatic probing platform.
Using proprietary wafer ring clamping chucks the PegasusTM A200D has a capacity of load from two cassettes, each containing 25 wafers.
The PegasusTM A200D features highly advanced upper and lower probe arm callipers which can be controlled to simultaneously contact the top and bottom side of the wafer using multiple needle probe cards.
The PegasusTM A200D Series probers deliver menu- driven, push button control via proprietary LabMasterTM control and monitoring software.
Simultaneous, double-sided probing of up to 8" wafers
Powerful, user-friendly control and monitoring software
Planarization of needle sets and constant preset needle load
Pattern recognition system
Robot handling system
Configurable to high voltages in excess of 5 kV for specialized application
PROBER
XY STAGE
Type
High precision re-circulating ball screws
Stage Travel 210 mm x 210 mm (8.3” X 8.3”)
Resolution 1.25 μm
Accuracy ± 7 μm over 200mm
Repeatability ± 4 μm
XY Speed Up to 100 mm/s
Automatic Alignment Repeatability ± 5 μm
WAFER HANDLER
ROBOT Speed 1270 mm/s (R), 254 mm/s (Z), 800 o/s (Ø)
Positional Repeatability 12.7 μm (Z), 38.1 μm (R)
0.01°(Ø) at constant temperature
Flat Orientation Selectable
Pre-Alignment Accuracy ± 63.5 μm ± 0.125o
Repeatability ± 4 μm
XY Speed Up to 100 mm/s
