Automated Spectral Reflectometry  Metrology System

  • Product No:NanoSpec II
  • Manufacturer:Onto Innovation Inc.(原Nanometrics Inc.)

Extending the range and performance of the industry proven NanoSpec 6100, the NanoSpec II introduces a new design with automated sample alignment, fast autofocus, sub 1-second per site measurement time and measurement repeatability better than 1Å. For existing 6100 customers, the NanoSpec II will offer an intuitive recipe transfer system, offering full backward compatibility of all measurement recipes. The system can be incorporated with Nanometrics’ powerful NanoDiffract® spectroscopic reflectivity analysis software, image processing for automated pattern alignment and an optional robotic 200mm wafer handling system, making the NanoSpec II the most powerful thin film system in its class.

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