The Model 212 Large Area Mask Aligner is a cost-effective, high performance Mask Aligner that has been engineered with OAI’s industry proven components that have made OAI a leader in the photolithography equipment industry. The Model 212 is a bench top mask aligner that requires minimal cleanroom space, and offers an economic alternative for R&D for large area substrates, LCD, Thin Film Transistors, panel level packaging, and OLED. Utilizing OAI’s innovative vacuum chuck leveling system, large substrates (up to 12’x12’ or 300mm x 300mm) are leveled quickly and gently for exceptional photo mask alignment and uniform contact during exposure. The system is capable of one micron resolution and alignment.
The alignment module features mask insert sets and quick-change wafer chucks that facilitate the use of a variety of substrates and masks without requiring special tools. The Model 212 Large Area Mask Aligner features the proven OAI UV light source which provides collimated UV light in Near, Mid or Deep UV using lamps ranging in power from 200 to 2000 watts. Dual-sensor optical feedback loops are linked to the constant intensity controller to provide control of exposure intensity within ±2% of the desired intensity.
Features
A lower cost research and development tool for large area substrates
A versatile tool that can accommodate smaller substrates and masks - easily upgraded for larger substrates
Used for Packaging, Displays, OLED, Semiconductor Wafer R&D
Featuring the same specifications as the OAI Model 200 Tabletop Mask aligner
Substrate Size | Up to 12” square or 300mm | |
Substrate Stage | X, Y Travel | ±10mm |
Z Travel | 5mm | |
Micrometer | .001”; .0001” | |
Graduations | or .01mm; .001mm | |
Rotation | ±3.5˚ | |
Mask | Size | Up to 14” x 14” |
Lightsource | Beam Size | Up to 12” square |
Lamp Power | 200, 350, 500, 1,000, and 2,000 Watt NUV 500, 1,000 and 2,000 Watt DUV | |
Shutter Timer | Timer | 0.1 to 99.0 sec. at 0.1 second increments or 1.0 to 999 sec. at 1.0 second increments |
Facilities | Electrical | 110 or 220 vac (or other according to Power Supply requirements and Country) |
Vacuum | 20 - 28” Hg. | |
Air and N2 | CDA at 60 PSI and N2 at 20 PSI | |
Exhaust | 0.35” to 0.5” Water | |
Dimensions | Height | 42” (1067mm) |
Width | 60” (1524mm) | |
Depth | 53” (1346mm) |