RT-3000/RG-2000(3000) is a high-precision semi-automatic four-probe resistivity measurement device launched by Japan's Napson Company. It can be controlled by a computer, edit the size of the silicon wafer to be tested, test points, and use the principle of four-probe resistivity measurement for multi-point measurement. It can output 2D/3D Mapping through software to complete the measurement more efficiently task.
User programmable measurement mode
The tester has a self-check function and a wide measuring range
As well as the thickness, edge and temperature correction of the silicon wafer
Metal film thickness conversion and other functions
Application: semiconductor materials, solar cell materials (silicon, polysilicon, silicon carbide, etc.), new materials, functional materials (carbon nanotubes, DLC, graphene, nano silver wires, etc.)
Conductive film (metal, ITO, etc.), diffusion layer, silicon-related epitaxial materials, ion implantation samples.
It has multi-point measurement function (maximum 1225 points), supports Mapping function, and provides 2D image/3D image analysis.
Test data can be exported through CSV format files.
Meet the following ASTM & JIS requirements
JIS H 0602-1995, JIS K 7194-1994.
ASTM F 84-99 (SEMI MF84)
ASTM f374 -00a,
ASTM F 390-11,
ASTM F 1529-97
RT-3000/RG-2000 supports up to 8 inches
RT-3000/RG-3000 supports up to 12 inches
V/I resistance: 1m ~ 3M ohm
Square resistance: 1m ~ 10M ohm/sq
Resistivity: 1μ ~ 1M ohm.cm