Intevac’s MATRIX™ PVD System has extensive range of PVD sources and technologies produce the films that enable advanced solar cell designs. These advanced films are what solar cell manufacturers require to be competitive and are delivered with the Intevac Matrix® PVD platform.
Application film as Al, Ti, NiV, TiW, Cu, TCO, ITO.
· Advanced applications include IBC, Cu Seed, HJT and PERL/T
· Able to tune RI (Refractive Index) of ITO (Indium Tin Oxide) for Heterojunction Technology
· Integrated aluminum back metal and capping film capability
· Small batch processing of multiple wafers in processing area of 650mm x 650mm
