Intevac Vertex Marathon™ for OLEDoS Multilayer PVD Deposition

  • Product No:Vertex Marathon™
  • Manufacturer:Intevac

The Vertex Marathon™ is the newest generation in the Vertex family. It is designed for high volume manufacturing. Marathon processes 200mm and 300mm substrates with unique process capabilities and patented applications for a variety of metals and ITO.

• EFEM contains FOUPS and Robot with End-effector

• 50 WPH for entire stack

• Easy handling and loading of substrates

• Accurate and repeatable positioning of substrate deposition

• Multilayer deposition in various material stack options without the need to break the vacuum

• Inductively Coupled Plasma (ICP)

• Linear Pulsed DC Magnetron Sputter

• Cylindrical Rotating Pulsed DC Magnetron Sputter

(CMAG)

• Linear Scanning Magnet Array (LSMA)