PEGASUS FAPG150 is develpoed for testing components such as DIODE, MOSFET and IGBT wafers. PEGASUS FAPG150 is a probe station with double-sided automatic probe structure. A robot arm automatically picks up a wafer to pre-aligner and to the probing position. The circular chuck plate provides a stable and fast test environment. For different applications, it is possible
to set the optimal probing speed and probe mark. Customized designs are also available on request.
Features
Simple operation interface and joystick design
Wafer mapping creation and editing functions
Easy-to-use English Windows user interface
Different product profiles can be created
Automatic wafer alignment and search for the initial die
Easy-to-maintain modular electronic control structure
High-precision drive motor provides a stable and quiet operating environment
Two cassettes can be placed at the same time
Pre-aligner for wafer alignment
Standard TTL/RS232 communication interface for variety of testers
Excellent probing speed and probe marks
Customized designs available
Selectable 4" or 6" chuck plate
X/Y axis
Architecture: High-precision circulating ball screw
Travel: 285mm × 250mm
Resolution: 0.5 μm
Accuracy: ≤±7 μm /203mm
Repeatability: ≤±4 μm/203mm
Z axis
Travel: 10mm
Resolution: 1 μm
Accuracy: ≦±4 μm
Repeatability: ≦±4 μm
Theta axis
Travel: ±10°
Resolution: 0.001°
Chuck plate
Material: PEEK
Wafer size: 4” ~ 8”
Hot chuck optional
CCD Wafer level adjustment
Designed for your chip size
Standard: 1/3” 1024X768 CCD
0.5X lens(ROI: 9.6mm X 7.2mm)
Microscope
Three-eye microscope
LED ring lamp
Magnification: X0.67 ~ X4.5
Eyepiece: X10 or X20
Dimensions
950(D) × 1360(W) × 1730(H) mm (Excludes display and signal tower)
Weight
550Kg(Excludes tester)
Vacuum
4-6Kgf/cm²
Air pressure
0.5MPa
