Focus on DIODE, TVS, MOSFET, IGBT wafer level device probing. PEGASUS FAPG150D fully automatic double side probe provide you, auto wafer pick up, wafer level adjustment and wafer map scan. Whole wafer holder design provide you stable and fast testing, and also control perfect probe mark for all of your products.
Features
For double side wafer application
Windows OS, easy to operation
Recipe editable
Wafer level adjustment
Modularization design, easy to keep
High precision motor, low noise
Two cassette design
TL/RS232 interface integrable for all the tester
High performance probing speed and tip mark great control
Customize available
Support 4 or 6 inch wafer holder
Simple operation platform and joystick design
Wafer mapping creation and editing
X/Y axis
Architecture: High-precision circulating ball screw
Travel: 285mm × 250mm
Resolution: 0.5 μm
Accuracy: ≤±7 μm /203mm
Repeatability: ≤±4 μm/203mm
Clip arm
Stroke : 20mm
Resolution : 1um
Accuracy : ≦±2um
Repeatability : ≦±4um
Wafer holder
Material : Peek
Size : 6”or 4” available
Stage
Inker : 1set
Throughput
Microscope
Digital Microscope
LED light inside
Magnification: X20 ~ X90
Dimension
1020(D) × 1360(W) × 1465(H) mm (exclude LCD monitor and signal tower)
Weight
550Kg(Excludes tester)
Vacuum
4-6Kgf/cm²
Air Pressure
0.5MPa
