Qphoton-L is a precise and cost-effective system for measuring the thickness of thin films, specifi- cally designed for customers in the solar cell industry. Its design and algorithm are tailored to meet the testing requirements of Texture, and it allows for quick, highly precise, and accurate measurement of the thickness, refractive index (n), and extinction coefficient (k) of nano films. Qphoton-L is particu- larly suitable for industrial products, mass production detection in scientific research, and new product development. It can also be used to characterize the thickness of single-layer and multilayer nano films. Its applications span across almost all fields of nanothin film, such as microelectronics, semi-
·conductors, integrated circuits, display technology, and solar cells. ·Qphoton-L can simultaneously measure:
·Multilayer film thickness
Film thickness range
1~2000nm
Film thickness accuracy
SiO2-100nm Sample film thickness accuracy:0.5nm; Repeatability:±0.2nm;
Refractive index accuracy:0.005; Repeatability:±0.002
Si/Si3N4/Al2O3 Sample film thickness accuracy:0.5nm; Repeatability:±0.2nm;
Refractive index accuracy:0.005; Repeatability:±0.002
Laser wavelength
635nm (Other wavelengths are optional)
Spot size
2~4mm(option:100/200um)
Incidence angle range
45°~90°(Manual 5° step)
Loading platform
Compatible with 220mm * 220mm and smaller size samples
Output
Qview software can concisely display test results and report to customer system
Test speed
1~3 s/point
Computer
A multi-core processor of Windows 10
Size
670mmL* 390mmD* 370mmH
Weight
22Kg
