UV Light & Intensity Energy Meter

Product No:Model 358
Manufacturer:OAI INSTRUMENTS

Quotation

UV Light & Intensity Energy Meters for High Intensity Steppers - ASML, Nikon, Canon, and Ultratech

OAI Nikon Stepper Trade in Offer for model 358 image

This instrument is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. The microprocessor based Model 358 UV Light Intensity & Energy Meter performs measurement, storage and recall of nine series of readings. Reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) for 365, 400, 420, and 436 nm wavelengths.

oai nuv response curve image

APPLICATION
Perfect for a wide variety of industries where the precision measurement of UV energy is essential, the Model 358 is designed for any application requiring repeatable, reliable UV measurement.

FEATURES

Digital Display provides clear measurements traceable to NIST
Measures Intensity, Time, and Energy
Records % deviation over a series of exposures
Probe wavelength display helps prevent errors in setup
Simple push button operation provides reliable results
Detachable probes to match the spectral response of many photoresists
Display readings can be frozen
Front panel reminders prompt the user
Rugged aluminum case features handle and probe pouch for portability

Model	317	356	357/457	358/458	459
Intensity Range (mw/cm2)	16-1600	0.1-400	16-1600	40-4000	up to 6000 0-9999 0-9999 365, 400 420, 436 ± 3% 2 Extreme High Intensity Ultratech Steppers
Energy Range (mJ/cm2)	0-9999	0-9999	0-9999	0-9999
Time Range (seconds)	0-9999	0-9999	0-9999	0-9999
Wavelength (nm) (other wavelengths available)	310, 365 380, 400, 436	220, 254 260, 310, 365, 380, 400, 420, 436,	365, 400 420, 436	365, 400 420, 436
		540
Accuracy	± 3	± 3	± 3.0 (WB) ± 1.5 (NB)	± 3.0 (WB) ± 1.5 (NB)
Linearity (%)	2	2	2	2
			Standard
Used for:	Projection	All	ASML, Nikon	High Intensity
	Aligners	Mask	GCA, Canon,	Steppers
		Aligners	Rudolph
			Technology
			Steppers
Calculations Average energy; Percent deviation in energy, intensity and time for up to nine channels I/O Print, Channel Select, Enable, Probe, Wavelength Check Power 110/220 VAC, 50/60 Hz, Rechargeable 6v Battery (with automatic shut off) Dimensions (centimeter) 30.5 W x 12.7 H x 22.9 D • (inches) 12.0 W x 5.0 H x 9.0 D Weight Approximately 3.6 kg (8.0 lbs)

OAI Model 358 Datasheet

2018-04-08

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