The nSpec® is a fully automated, precision optical inspection system for viewing, analyzing and reporting on defects in opaque, transparent and semi-transparent wafers. Defect reports are fully customizable.
The nSpec® system can image and analyze:
Substrate wafers
Epi wafers
Patterned wafers
Diced wafers
Individual devices
Optics
White light illumination:LED
Bright field/dark field objectives:5x and 10x, other magnifications optional
Differential interference contrast:Nomarski
Stage
Travel,typical:200mm X and Y direction
Precision Lead Screws:2 mm pitch, preloaded ball screws
Centered load capability:2.27 kg
Repeatability:
Construction:a) Precision ground alum plates
b) Stainless steel raceways with cross roller bearings
Step Size:0.04 μ
Travel flatness:30 μ
Weight:5.44 kg
Limit switches:Mechanical, non-adjustable
Wafer Vacuum Chuck (optional): Adjustable to 50, 75, 100 or 150 mm
Camera
Pixel size,typical:4.54μ
Image size,typical:2752x 2200 pixels
Maximum frame rate:17.4fps
Control
Stage Fully automated control for all system components.
Focus System allows for manual user operation.
Nosepiece
Illumination
Camera
Wafer Loader
Runs one cassette at a time:25 wafers/cassette
Standard Wafer Sizes:75, 100 or 150 mm
Dimension (width x length):36 cm x 75 cm
Weight:34 kg
Minimum Vacuum Requirement:20 in. Hg
Power supply:110v/220v